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Scanning electron microscope
Tescan MIRA3

  • Manufacturer: Tescan, Czech Republic
  • Chamber size: 340 mm x 315 mm with motorized stage
  • Maximal resolution: 1 nm @ 30 kV
  • Magnification: 2x - 1 000 000x
  • Electron gun: Schottky Field Emission
  • Detectors: SE, BSE, InBeam-SE, InBeam-BSE
  • Chemical analysis: EDX, WDX, EBIC