Back to equipment

Thin film deposition system
HVM Flexilab

  • Manufacturer: HVM Plasma spol s.r.o., Czech Republic
  • Sputtering sources: up to 3
  • Target: circular 2"
  • Power supply: 3x DC, 1x p-DC, 1x RF, optional HiPIMS
  • Deposition temperature: 20°C - 600°C
  • Base pressure: 2E-5 Pa
  • Additional infofmation: fully automated control system