Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy

P. Vašina, M. Fekete, J. Hnilica, P. Klein, L. Dosoudilová, P. Dvořák, Z. Navrátil

Paper presents a method using effective branching fractions which enables us to determine the density of titanium atoms and ions from the intensity of self-absorbed spectral lines. The method is based on the fitting of theoretically calculated branching fractions to experimentally measured ratios of the relative intensities of selected resonant titanium atomic and ionic lines. The method was successfully applied on DC and HiPIMS discharge.

Plasma Sources Science and Technology 24 (2015) 065022

Understanding of hybrid PVD-PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron

R. Žemlička, M. Jílek, P. Vogl, P. Souček, V. Buršíková, J. Buršík, P. Vašina

Paper presents a study dealing with diagnostics and understanding of hybrid PVD-PECVD deposition process from titanium target in the atmosphere enriched with the acetylene gas. Coatings were prepared using an industrial deposition system. Based on comparison between the process properties and their films produced, the parameters are proposed for the algorithm used for the industrial deposition nc-TiC/a-C:H coatings.

Surface & Coatings Technology 255 (2014) 118-123

Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties

P. Souček, J. Daniel, J. Hnilica, K. Bernátová, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina

Paper presents a comparative study where deposition process as well as nc-TiC/a-C:H films produced using direct current magnetron sputtering are compared to those produced by high power impulse magnetron sputtering. The differences occurring during the deposition process are identified. Additionally, determined structure differences between the films prepared by both methods are used to explain the improved mechanical properties observed for the films created by high power impulse magnetron sputtering.

Surface & Coatings Technology 311 (2017) 257-267

Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma

P. Klein, F. Lockwood Estrin, J. Hnilica, P. Vašina, J.W. Bradley

Paper presents a study of ionization zones called spokes to which plasma self-organizes during the HiPIMS pulse. For the study simultaneous measurement of fast camera and a novel plasma diagnostic method of strip probes were utilized. The dual diagnostic system allowed to observe merging and splitting of spokes over time. It was found, that spokes merge and split seemingly randomly in time, but their amount always oscillates around some stable configuration. A simple phenomenological model was developed that related the number of observed spokes to the spoke dimensions, spoke velocity and gas atom velocity.

Journal of Physics D: Applied Physics 50 (2017) 015209

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