PVD Laboratory

Diagnostic method
Probe diagnostics

The local current on the target could be measured by strip probes incorporated in the target but isolated from the rest of the target. Each strip probe is connected to the power supply to maintain the potential equal to the rest of the target. The strip probe current contribution to the total discharge current is measured separately for each probe. The temporal evolution of the current density could be determined in both non-reactive and reactive magnetron sputtering.