Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
K. Bernátová, M. Fekete, P. Klein, J. Hnilica, P. Vašina
V tomto článku byly určeny koncentrace atomů a iontů titanu v základním stavu, a také ionizační stupeň. Ke stanovení koncentrací rozprášených částic byla použita metoda efektivních větvících poměrů. Nejvyššího, 90 % ionizačního stupně bylo dosaženo v oblasti u magnetronového terče pro střídu 1,2 %. V oblasti u substrátu pro střídu nižší než 2 % dosáhl ionizační stupeň rozprášených částic vždy alespoň 50 %.
Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target
M. Kroker, P. Souček, M. Šlapanská, V. Sochora, M. Jílek, P. Vašina
Tato práce představuje postup, jak předpovědět chemické složení a rychlosti depozice tenkých vrstev. Simulované chemické složení a relativní rychlost depozice byly ověřeny a validovány experimenty. Chemické složení povlaků bylo korelováno s umístěním jednotlivých segmentů terče a byl diskutován vliv pohybu substrátu na chemické složení povlaků. Simulace odhalily odlišné trajektorie těžkých a lehkých částic.
Spatially resolved study of spokes in reactive HiPIMS discharge
M. Šlapanská, M. Kroker, P. Klein, J. Hnilica, P. Vašina
Tento příspěvek přináší pohled na ionizační zóny tzv. „spokes“ v argon dusíkové atmosféře s použitím titanového terče. Cílem bylo popsat nejen globální parametry ionizačních zón, jako je jejich tvar, délka a rychlost šíření, ale také poskytnout popis parametrů vyvíjejících se v průběhu ionizační zóny, jako je plovoucí potenciál a emise plazmatu ve viditelné oblasti spektra. Měření posledně jmenovaného jasně ukázalo, které částic emitují nejvýrazněji a jak se jejich emise mění při přechodu od argonového výboje k výboji hořícím v čistém dusíku.
Microstructure of titanium coatings controlled by pulse sequence in multipulse HiPIMS
P. Souček, J. Hnilica, P. Klein, M. Fekete, P. Vašina
V tomto článku byl k depozici kovových titanových tenkých vrstev použit standardní jednopulsní HiPIMS (s-HiPIMS), multipulsní HiPIMS (m-HiPIMS) a stejnosměrné magnetronové naprašování. Různý počet pulzů v jedné sekvenci pulzů při m-HiPIMS umožňoval ovlivnit toky iontů na substrátu a ionizaci rozprašovaného titanu. Použitím m-HiPIMS bylo možné dosáhnout povlaků s hladší povrchovou morfologií a nižší drsností. Počet pulzů také významně ovlivňoval texturu a rychlost depozice.
Seznam všech publikací
2024
- A Long-Term Study on the Bactericidal Effect of ZrN-Cu Nanostructured Coatings Deposited by an Industrial Physical Vapor Deposition System
S. Behrangi, E. Staňková, I. Sedláček, L. Šimoníková, P. Souček, V. Buršíková, V. Sochora, K. Novotný, P. Vašina
Nanomaterials 14 (2024) 496 - Effect of Nb incorporation in Mo2BC coatings on structural and mechanical properties — ab initio modelling and experiment
J. Ženíšek, P. Souček, P. Ondračka, Z. Czigány, V. Buršíková, D. Holec, K. Balázsi, P. Vašina
Acta Materialia (2024) 119741 - High-power-density sputtering of industrial-scale targets: Case study of (Al, Cr)N
F.F. Klimashin, J. Klusoň, M. Učík, R. Žemlička, M. Jílek, A. Lümkemann, J. Michler, T.E.J. Edwards
Materials & Design 237 (2024) 112553 - Aluminum tantalum oxide thin films deposited at low temperature by pulsed direct current reactive magnetron sputtering for dielectric applications
R. Drevet, P. Souček, P. Mareš, P. Ondračka, M. Dubau, T. Kolonits, Z. Czigány, K. Balázsi, P. Vašina
Vacuum 221 (2024) 112881
2023
- Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
P. Klein, J. Hnilica, D. Lundin, P. Dvořák, M. Zanáška, U. Helmersson, P. Vašina
Plasma Sources Science and Technology 32 (2023) 075019 - Dynamics of sputtered particles in multipulse HiPIMS discharge
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Plasma Sources Science and Technology 32 (2023) 045003 - NOMAD: A distributed web-based platform for managing materials science research data
M. Scheidgen, L. Himanen, A. N. Ladines, D. Sikter, M. Nakhaee, Á. Fekete, T. Chang, A. Golparvar, J. A. Márquez, S. Brockhauser, S. Brückner, L. M. Ghiringhelli, F. Dietrich, D. Lehmberg, T. Denell, A. Albino, H. Näsström, S. Shabih, F. Dobener, M. Kühbach, R. Mozumder, J. F. Rudzinski, N. Daelman, J. M. Pizarro, M. Kuban, C. Salazar, P. Ondračka, H.-J. Bungartz, C. Draxl
The Journal of Open Source Software - Dynamic Impact Resistance and Scratch Adhesion of AlCrN Coatings Sputtered Using Cathodic Arc Glow Discharge
J. Daniel, R. Žemlička, M. Alishahi, P. Karvánková, P. Souček, D. Karpinski, T. Fořt, H. Bolvardi, A. Lümkemann, P. Vašina
Coatings 13 (2023) 515 - Correlative Theoretical and Experimental Study of the Polycarbonate | X Interfacial Bond Formation (X = AlN, TiN, (Ti,Al)N) During Magnetron Sputtering
L. Patterer, P. Ondračka, D. Bogdanovski, S. Mráz, S. Karimi Aghda, P. J. Pöllmann, Y. Chien, J. M. Schneider
Advanced Materials Interfaces - On the determination of the thermal shock parameter of MAX phases: A combined experimental-computational study
M. Fekete, C. Azina, P. Ondračka, L. Löfler, D. Bogdanovski, D. Primetzhofer, M. Hans, J. M. Schneider
Journal of the European Ceramic Society - Phase formation of powders sputtered from X2BC targets and XC+XB powder mixtures {X = Nb, Ta, W}
S. Debnárová, P. Souček, P. Ondračka, D.M. Holzapfel, S. Mráz, J.M. Schneider, P. Vašina
Surface and Coatings Technology (2023) 129379 - Multilayer thin films of aluminum oxide and tantalum oxide deposited by pulsed direct current magnetron sputtering for dielectric applications
R. Drevet, P. Souček, P. Mareš, M. Dubau, Z. Czigány, K. Balázsi, P. Vašina
Vacuum 210 (2023) 111870 - Industrially deposited hard and damage resistant W-B-C coatings
M. Kroker, P. Souček, L. Zábranský, V. Buršíková, Z. Czigány, V. Sochora, K. Balázsi, M. Jílek, P. Vašina
Surface and Coatings Technology 454 (2023) 129150
2022
- Synthesis and characterization of the ceramic refractory metal high entropy nitride thin films from Cr-Hf-Mo-Ta-W system
T. Stasiak, P. Souček, V. Buršíková, N. Koutná, Zs. Czigány, K. Balázsi, P. Vašina
Surface and Coatings Technology 449 (2022) 128987 - An Assessment of the Bactericidal and Virucidal Properties of ZrN-Cu Nanostructured Coatings Deposited by an Industrial PVD System
S. Behrangi, I. Sedláček, J. Štěrba, G. Suková, Zs. Czigány, V. Buršíková, P. Souček, V. Sochora, K. Balázsi, P. Vašina
Coatings 12 (2022) 1330 - Modelling of dcMS and HiPIMS process with hydrocarbon gas admixture
M. Fekete, M. Kroker, P. Souček, P. Klein, P. Vašina
Plasma Sources Science and Technology 31 (2022) 065008 - Spatially resolved study of spokes in reactive HiPIMS discharge
M. Šlapanská, M. Kroker, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 31 (2022) 055010 - Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target
M. Kroker, P. Souček, M. Šlapanská, V. Sochora, M. Jílek, P. Vašina
Surface and Coatings Technology 438 (2022) 128411 - Dynamics of bipolar HiPIMS discharges by plasma potential probe measurements
M. Zanáška, D. Lundin, N. Brenning, Hao Du, P. Dvořák, P. Vašina, U. Helmersson
Plasma Sources Science and Technology 31 (2022) 025007 - Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering
M. Polaček, P. Souček, M. Alishahi, N. Koutná, P. Klein, L. Zábranský, Zs. Czigány, K. Balázsi, P. Vašina
Vacuum 199 (2022) 110937 - W 4f electron binding energies in amorphous W-B-C systems
J. Ženíšek, P. Ondračka, J. Čechal, P.Souček, D. Holec, P.Vašina
Applied Surface Science 586 (2022) 152824 - Phase formation, thermal stability and mechanical properties of Nb-B-C coatings prepared by combinatorial magnetron sputtering
S. Debnárová, P. Souček, V. Buršíková, M. Hans, D. M. Holzapfel, S. Mráz, J. M. Schneider, P. Vašina
Surface and Coatings Technology 433 (2022) 128137 - Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke
M. Šlapanská, M. Kroker, J. Hnilica, P. Klein, P. Vašina
Journal of Physics D: Applied Physics 55 (2022), 035205
2021
- Temporal studies of titanium ionised density fraction in reactive HiPIMS with nitrogen admixture
K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 30 (2021) 125002 - Microstructure of titanium coatings controlled by pulse sequence in multipulse HiPIMS
P. Souček J. Hnilica, P. Klein, M. Fekete, P. Vašina
Surface and Coatings Technology 423 (2021) 127624 - Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge
R. Žemlička, M. Alishahi, M. Jílek, P. Souček, J. Daniel, J. Klusoň, H. Bolvardi, A. Lumkemann, P. Vašina
Surface and Coatings Technology 422 (2021) 127563 - Spoke behaviour in reactive HiPIMS
P. Klein, J. Hnilica, M. Fekete, M. Šlapanská, P. Vašina
Plasma Sources Science and Technology 30 (2021) 055016
2020
- Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings
M. Kroker, P. Souček, P. Matej, L. Zábranský, Z. Czigány, K. Balázsi, P. Vašina
Coatings 10(9) (2020) 853 - The Effect of a Taper Angle on Micro-Compression Testing of Mo-B-C Coatings
L. Zábranský, K. Bernátová, J. Dluhoš, R. Váňa, P. Souček, P. Vašina, V. Buršíková
Materials 13 (2020) 3054 - Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Journal of Applied Physics 128 (2020) 043304 - Revisiting particle dynamics in HiPIMS discharges. I. General effects
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Journal of Applied Physics 128 (2020) 043303 - Effect of substrate bias voltage on the composition, microstructure and mechanical properties of W-B-C coatings
S. Mirzaei, M. Alishahi, P. Souček, V. Buršíková, L.Zábranský, L.Gröner, F. Burmeister, B. Blug, Ph. Daum, R. Mikšová, P. Vašina
Applied Surface Science 528 (2020) 146966 - Optical spectroscopy for sputtering process characterization
N. Britun, J. Hnilica
Journal of Applied Physics 127 (2020) 211101 - Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
K. Bernátová, M. Fekete, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 29 (2020) 055010 - Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge
M. Šlapanská, A. Hecimovic, J. T. Gudmundsson, J. Hnilica, W. Breilmann, P. Vasina, A. von Keudell
Journal of Physics D: Applied Physics 53 (2020) 155201 - The effect of chemical composition on the structure, chemistry and mechanical properties of magnetron sputtered W-B-C coatings: Modeling and experiments
S. Mirzaei, M. Alishahi, P. Souček, J. Ženíšek, D. Holec, N. Koutná, V. Buršíková, M. Stupavská, L. Zábranský, F. Burmeister, B. Blug, Zs. Czigány, K. Balázsi, R. Mikšová, P. Vašina
Surface and Coatings Technology 383 (2020) 125274 - A transition from petal-state to lotus-state in AZ91 magnesium surface by tailoring the microstructure
M. Safarpoura, S. A. Hosseini, F. Ahadani-Targhi, P. Vašina, M. Alishahi
Surface and Coatings Technology 383 (2020) 125239 - Adhesion and dynamic impact wear of nanocomposite TiC-based coatings prepared by DCMS and HiPIMS
J. Daniel, P. Souček, J. Grossman, L. Zábranský, K. Bernátová, V. Buršíková, T. Fořt, P. Vašina, J. Sobota
International Journal of Refractory Metals and Hard Materials 86 (2020) 105123 - Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
K. von Fieandt, E. M. Paschalidou, A. Srinath, P. Souček, L. Riekehr, L. Nyholm, E. Lewin,
Thin Solid Films 693 (2020) 137685 - Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture
M. Fekete, K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 29 (2020) 025027
2019
- Study of W-B-C thin films prepared by magnetron sputtering using a combinatorial approach
S. Debnárová, L. Zábranský, P. Souček, V.Buršíková, P. Vašina
International Journal of Refractory Metals and Hard Materials 85 (2019) 105066 - Microstructural changes of amorphous Mo–B–C coatings upon thermal annealing
L. Zábranský, P. Souček, P. Vašina, J. Dugáček, P. Sťahel, J. Buršík, M. Svoboda, R. Mikšová, V. Peřina, K. Balázsi, Z. Czigány, V. Buršíková
Surface and Coatings Technology 379 (2019) 125052 - On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target
M. Kroker, Zs. Czigány, Z. Weiss, M. Fekete, P. Souček, K. Balázsi, V. Sochora, M. Jílek, P. Vašina
Surface and Coatings Technology 377 (2019) 124864 - Evolution of discharge parameters and sputtered species ionization in reactive HiPIMS with oxygen, nitrogen and acetylene
M. Fekete, K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 28 (2019) 025011 - Effect of bonding structure on hardness and fracture resistance of W-B-C coatings with varying B/W ratio
S. Mirzaei, M. Alishahi, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, V. Peřina, K. Balázsi, Zs. Czigány, P. Vašina
Surface & Coatings Technology 358 (2019) 843-849 - The statistics of spoke configurations in high-power impulse magnetron sputtering discharges
P. Klein , J. Hnilica, M. Zemánek, J. W. Bradley, P. Vašina
Journal of Physics D: Applied Physics 52 (2019) 125201
2018
- The tribological properties of short range ordered W-B-C protective coatings prepared by pulsed magnetron sputtering
S. Debnárova, P. Souček, P. Vašina, L. Zábranský, V. Buršíková, S. Mirzaei, Y. Pei
Surface & Coatings Technology 357 (2018) 364-371 - Effect of magnetic field on spoke behaviour in HiPIMS plasma
J. Hnilica, P. Klein, M. Šlapanská, M. Fekete, P. Vašina
Journal of Physics D: Applied Physics 51 (2018) 095204 - Evolution of structure and mechanical properties of hard yet fracture resistant W-B-C coatings with varying C/W ratio
M. Alishahi, S. Mirzaei, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, V. Peřina, K. Balázsi, Zs. Czigány, P. Vašina
Surface & Coatings Technology 340 (2018) 103-111 - Fracture resistance enhancement in hard Mo-B-C coatings tailored by composition and microstructure
P. Souček, L. Zábranský, V. Buršíková, J. Buršík, S. Debnarova, M. Svoboda, V. Perina, P. Vašina
Journal of Nanomaterials (2018) 5184584
2017
- Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS
M. Fekete, J. Hnilica, C. Vitelaru, T. Minea, P. Vašina
Journal of Physics D: Applied Physics 50 (2017) 365202 - On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings
J. Daniel, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina
Surface & Coatings Technology 328 (2017) 462-468 - Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings
J. Daniel, P. Souček, K. Bernátová, L. Zábranský, M. Stupavská, V. Buršíková, P. Vašina
Journal of Nanomaterials 166 (2017) 1-13 - Thermal stability of hard nanocomposite Mo-B-C coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, J. Dugáček, P. Sťahel, J. Buršík, M. Svoboda, V. Peřina
Vacuum 138 (2017) 199-204 - On the significance of running-in of hard nc-TiC/a-C:H coating for short-term repeating machining
R. Žemlička, P. Souček, P. Vogl, M. Jílek, V. Buršíková, P. Vašina, Y. Pei
Surface & Coatings Technology 315 (2017) 17-23 - Cathode voltage and discharge current oscillations in HiPIMS
P. Klein, J. Hnilica, Z. Hubička, M. Čada, M. Šlapanská, M. Zemánek, P. Vašina
Plasma Sources Science and Technology 26 (2017) 055015 - Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure andmechanical properties
P. Souček, J. Daniel, J. Hnilica, K. Bernátová, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina
Surface & Coatings Technology 311 (2017) 257-267 - Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
P. Klein, F. Lockwood Estrin, J. Hnilica, P. Vašina, J.W. Bradley
Journal of Physics D: Applied Physics 50 (2017) 015209 - Characterization of Ta-B-C nanostructured hard coatings
J. Buršík, V. Buršíková, P. Souček, L. Zábranský, P. Vašina
IOP Conference Series-Materials Science and Engineering 175 (2017) 012020
2016
- On the study of the mechanical properties of Mo-B-C coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, J. Buršík
The European Physical Journal - Applied Physics 75 (2016) 24716-p1 - 24716-p7 - Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions
R. Žemlička, M. Jílek, P. Vogl, J. Šrámek, P. Souček, V. Buršíková, P. Vašina
Surface & Coatings Technology 304 (2016) 9-15
2015
- Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy
P. Vašina, M. Fekete, J. Hnilica, P. Klein, L. Dosoudilová, P. Dvořák, Z. Navrátil
Plasma Sources Science and Technology 24 (2015) 065022 - Comparative analysis of thermal stability of two different nc-TiC/a-C:H coatings
L. Zábranský, V. Buršíková, J. Daniel, P.Souček, P. Vašina, J. Dugáček, P. Sťahel, O. Caha, J. Buršík, V. Peřina
Surface & Coatings Technology 267 (2015) 32-39
2014
- Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
A.A. El Mel, E. Gautron, F. Christien, B. Angleraud, A. Granier, P. Souček, P. Vašina, V. Buršíková, M. Takashima, N. Ohtake, H. Akasaka, T. Suzuki, P.Y. Tessier
Surface & Coatings Technology 256 (2014) 41-46 - On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux
P. Souček, T. Schmidtová, L. Zábranský, V. Buršíková, P. Vašina, O. Caha, J. Buršík, V. Peřina, R. Mikšová, Y.T. Pei, J.Th.M. De Hosson
Surface & Coatings Technology 255 (2014) 8-14 - Understanding of hybrid PVD-PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron
R. Žemlička, M. Jílek, P. Vogl, P. Souček, V. Buršíková, J. Buršík, P. Vašina
Surface & Coatings Technology 255 (2014) 118-123 - Study of the thermal dependence of mechanical properties, chemical composition and structure of nanocomposite TiC/a-C:H coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, T. Gardelka, P. Sťahel. O. Caha, V. Peřina, J. Buršík
Surface & Coatings Technology 242 (2014) 62-67 - Tribological properties of nc-TiC/a-C:H coatings prepared by magnetron sputtering at low and high ion bombardment of the growing film
P. Souček, T. Schmidtová, V. Buršíková, P. Vašina, Y.T. Pei, J.Th.M. De Hosson, O. Caha, V. Peřina, R. Mikšová, P. Malinský
Surface & Coatings Technology 241 (2014) 64-73
2013
- Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply
T. Schmidtová, P. Souček, V. Kudrle, P. Vašina
Surface & Coatings Technology 232 (2013) 283-289 - Laser desorption ionisation quadrupole ion trap time-of-flight mass spectrometry of titanium-carbon thin films
F. Amato, N.R. Panyala, P. Vašina, P. Souček, J. Havel
Rapid Communications in Mass Spectrometry 27 (2013) 1196-1202
2012
- Evaluation of composition, mechanical properties and structure of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering
P. Souček, T. Schmidtová, L. Zábranský, V. Buršíková, P. Vašina, O. Caha, M. Jílek, A.A. El Mel, P.Y. Tessier, J. Schäfer, J. Buršík, V. Peřina, R. Mikšová
Surface & Coatings Technology 211 (2012) 111-116
2011
- Study of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene
T. Schmidtová, P. Souček, P. Vašina, J. Schäfer
Surface & Coatings Technology 205 (2011) S299-S302 - Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
P. Vašina, P. Souček, T. Schmidtová, M. Eliáš, V. Buršíková, M. Jílek, M. Jílek jr., J. Schäfer, J. Juršík
Surface & Coatings Technology 205 (2011) S53-S56 - Study of the indentation response of nanocomposite n-TiC/a-C:H coatings
L. Zábranský, V. Buršíková, J. Buršík, P. Vašina, P. Souček, O. Caha, M. Jílek, V. Peřina
Chemické listy 106 (2011) S1508-S1511